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Brief Biography

Hyo-Chang Lee is a professor at the Korea Aerospace University (KAU). Before joining KAU, he was a lecture/research professor at Hanyang University (2012-2015), a senior researcher in the Etch Technology Team, Memory Division, at Samsung Electronics (2015-2016), and principal research scientist at Korea Research Institute of Standards and Science (2016-2023). His work ranges from fundamental plasma physics (electron heating in ICPs and CCPs, control of electron energy distribution functions, plasma diagnostics) to applications (etching/deposition/ashing, nanomaterials generation, plasma surface interaction). He developed a variety of models and diagnostic tools. He received various awards such as the Korea Prime Minister Award of Invention Competition (2021), the 2020 Hershkowitz Early Career Award (2021), The KRISS prizes (2018, 2020), and IEEE senior member, as well as the Excellence Award for his Dissertation of Hanyang University (2012). He has published over 100 scientific papers including invited reviews, such as “Review of inductively coupled plasmas: Nano-applications and bistable hysteresis physics”, Applied Physics Reviews 5, 011108 (2018).

Education & Career

한양대학교 전기공학 박사 (2012, 박사학위 최우수 총장상)
한양대학교 강의교수/연구교수/리서치펠로우 (2012~2015)
프린스턴대학교 플라즈마 고등물리 연구소 (PPPL) 방문연구원 (2013)
삼성전자 메모리사업부 식각기술팀 책임연구원 (2015-2016)
한국표준과학연구원 첨단측정장비연구소 반도체측정장비팀 책임연구원 (2016-2023)

​항공대학교 항공전자정보공학부 교수 (2023~)

Awards and Recognitions

SCI 논문: Applied Physics Reviews 5 011108 2018 외 100편 이상

특허 : 국내외 등록 40 건 이상

한국표준과학연구원 기술상 대상 (2022)

The KRISS Prize of the Month (2021.6)

2021발명대전 국무총리상 수상

Hershkowitz Early Career Award (IOP PSST, 2020)

Distinguished Research Scientist (KRISS, 2020-2022)

The KRISS Prize of the Month (2018.6)

IEEE Senior Member (2018)

Excellence award for doctoral dissertation at Hanyang University (2012, only one selected)

Excellence paper award (The Research Institute of Industrial Science at Hanyang University, 2012, only one selected)

Young Vacuum Scientist Award (The Korean Vacuum Society, 2012)

Seoul Science Fellowship (2009)

Activity

한국진공학회 사업이사 (2019~) 플라즈마분과위원 (2017~)
국제학술대회 (ICMAP) Committee 
특허청 심사 자문위원 (202018-2020)

SK하이닉스반도체 외부강사 (2019, 2021)

한양대학교 전기공학과 겸임교수 (2019~2021)

산기평 차세대지능형반도체 기술개발사업 자문위원 (2020~)

Editorial Board of Plasma Sources Science and Technology (IOP) (2020~)

Editorial Board of Current Applied Physics (Elsevier) (2022~)

한국표준과학연구원 우대연구원 Distinguished research scientist (2020~2022)

​특허심판원 전문심리위원 (2021~)

​한국표준과학연구원 객원과학자 (2023~)

Editorial Advisory Board of Physics of Plasmas (https://pubs.aip.org/aip/pop) (2024~)

정보디스플레이학회   플라즈마 및 장비연구회  회장 (2024~)

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